Equipment Name:12 Inch DSP Unloading Station Equipment Function： A.Prevent wafer droping from the vacuum chuck. B.Set the slot information by MES communication automatically or manually. The station can collect wafer automatically as ordered. C.Finish the work by MES communication automatically and make MES account after the process. D.Prevent wafer slot mixing. E.Prevent wafer cruching，reduce wafer broken during the post process.